In modern semiconductor manufacturing, electronic specialty gases play a vital role. These gases are not only key materials in the production process, but also directly affect the performance and quality of chips. Today, we will talk about these "invisible" important roles and how to ensure their quality through advanced online automated analysis systems.

What are electronic specialty gases?

Electronic specialty gases refer to gases used in the production of electronic products such as semiconductors and flat panel displays. They are of various types, ranging from basic high-purity gases such as nitrogen (N₂), helium (He), and argon (Ar) to more complex specialty gases such as nitrous oxide (N₂O), ammonia (NH₃), nitrogen trifluoride (NF₃), and carbon tetrafluoride (CF₄). These gases are involved in multiple process links such as cleaning, deposition, photolithography, and etching in semiconductor manufacturing.

Importance of electronic special gases

Electronic special gases account for up to 13% of the material cost of semiconductor manufacturing, second only to silicon wafers. These gases must reach extremely high purity during the production process, usually requiring trace impurities to be controlled at the ppt (parts per trillion) level. Because the presence of any impurities may affect the yield and reliability of the chip.

The role of online automated analysis systems

Real-time data and full-process tracking

• The system detects the purity of the gas in real time, and the data is characterized in real time, and the whole process is tracked and traced, providing a scientific basis for improving product quality and production processes.
• Real-time data analysis helps to quickly respond to abnormal situations, improve production efficiency and product qualification rate.

Reduce human errors and ensure safety

• The automation system reduces the errors of human operation and ensures the safety of the production process.
• Provide accurate data support to help process optimization and R&D innovation.

Intelligent control and customized services

• Transmit to the pretreatment system through compliant pipelines to ensure stable gas component analysis and accurate data.
• Integrate intelligent control systems to achieve precise control of gas flow and pressure to ensure the stability and consistency of the process. Achieve one-time injection to complete the detection of trace impurity components in the sample.
• We can provide customized solutions to meet the detection needs of different users.

With the vigorous development of semiconductor integrated circuits, photovoltaics and other industries, the demand for electronic special gases will continue to increase, and the requirements for their quality will become more stringent.

It is a highly intelligent online analysis solution for electronic special gases, ensuring the safe and stable operation of the online automated sample analysis system, and helping the electronic special gas industry to reach new heights.