In semiconductor and photovoltaic manufacturing, trace metal impurities in high-purity silane gas critically determine product performance and production yield. With the continuous refinement of chip fabrication processes, gas purity requirements have reached ppb (parts per billion) or even ppt (parts per trillion) levels, rendering traditional detection methods inadequate for modern intelligent manufacturing quality control.

There are four problems in the detection of metal impurities in silane gas:

1⃣ Extreme contamination risk: Manual sampling, container handling, and inadequate environmental cleanliness can easily introduce contaminants, leading to distorted test results.

2⃣ Significant safety hazards: Silane gas is chemically reactive and highly flammable in air, posing extreme risks during traditional manual operations.

3⃣ Complicated and inefficient process: Multiple steps including sampling, absorption, digestion, and transfer are required, consuming significant time and effort.

4⃣ Isolated and delayed data: Relying on manual recording makes real-time integration with ICP-MS and production management systems (MES/DCS) difficult, affecting quality traceability efficiency.

The GED series silane metal impurity sampling and preparation system features explosion-proof, ultra-clean, and fully automated operation. Specifically designed for semiconductor-grade electronic specialty gases and high-purity gases, it sets new benchmarks for safety, accuracy, and efficiency. The system enables real-time sample collection and automatic preparation, with complete sample processing and information automatically synchronized to the ICP-MS workstation for analysis.

Explosion-proof design, safe and worry-free

Eliminate potential safety hazards and ensure personnel and production safety.

Explosion-proof standard design with real-time monitoring of combustible gas concentration and temperature.

The system automatically cuts off the gas and power supply to prevent safety hazards.

Enable unmanned operation to prevent personnel from coming into contact with hazardous gases.

Cleanliness of 100 class, no pollution

Reduce the risk of contamination to the limit and ensure that every test data is authentic and reliable.

Integrated with a high-efficiency particulate air (HEPA) filter unit (FFU) achieving filtration efficiency ≥99.99995%.

The cleanliness of the core operation area is maintained at Class 100 level.

The self-purification time is high and the pollution risk is greatly reduced.

Full-process automation, high efficiency and precision

With one-click operation, free your workforce from tedious processes and boost efficiency by over 70%.

One-click operation automatically completes the entire process of sampling, purging, and absorption.

The gas sampling amount and flow rate were controlled precisely by impact gas washing method.

The system is equipped with high-purity PFA sampling bottles to achieve low-pollution and high-precision sampling.

Smart interconnection, direct data access

The data is automatically synchronized to MES/DCS, enabling closed-loop quality traceability management.

The visual interface monitors the instrument status in real time.

The sample bottle can be directly connected to ICP-MS for analysis without manual pretreatment.

The QC-Smart Middle Platform enables one-click upload of analytical reports to MES/DCS systems.

Mobile flexibility, time and effort saved

The cart design can enter the site for nearby sampling.

The detection period will be greatly shortened.

Reduce the dependence on manpower and the complexity of operation.

Full-process analysis and online implementation

It supports direct installation at key nodes such as production process pipelines, tank farms, and filling stations.

The whole process from sampling to analysis is online to avoid sample transfer contamination.

The GED system is not just an upgrade for your equipment, but also the cornerstone of quality control for your smart manufacturing journey.

Are you facing these issues: inconsistent silane detection results and significant yield fluctuations?

Is the traditional method inefficient and affecting the production rhythm?

Want to achieve real-time and traceable management of quality data?

Act now and contact us for a tailored solution!