Tungsten supply cuts hit the global semiconductor supply chain

Tungsten hexafluoride is the key precursor for making tungsten films in semiconductor CVD processes. It's used for chip contact holes, vias, and tungsten filling, and is an irreplaceable interconnect material in advanced 7nm and 5nm processes. Currently, China's exports of core tungsten products like tungsten carbide and ultrafine tungsten powder to Japan have dropped to zero for three consecutive months. Two Japanese companies, Kanto Denka and Chuo Glass, control about 25% of global tungsten hexafluoride capacity (around 2,200 tons/year), but due to a disruption in tungsten supply, they will permanently stop production starting July 1, 2026. Global prices for tungsten hexafluoride have surged 70%-90%, completely reshaping the supply chain landscape.

The key takeaway: The global tungsten hexafluoride supply chain is facing a structural overhaul, China's domestic production capacity is ramping up fast, and the demand for online analysis is about to explode.

Why is it so hard to analyze tungsten hexafluoride online?

The electronic-grade tungsten hexafluoride needs to be ultra-pure, at a ppb level (6N or higher), and its properties are super demanding: it liquefies very easily, so it has to be heated all the way to prevent condensation; it reacts instantly with water, producing highly toxic HF gas and tungsten oxide solids, which can clog pipes and corrode equipment; it’s extremely corrosive and can eat through regular stainless steel, copper, rubber, and standard plastics, so only special anti-corrosion materials are suitable. This puts very high requirements on the online analysis system’s airtightness, dryness, corrosion resistance, and non-adsorption.

Online Automated Analysis Solution for Tungsten Hexafluoride

It’s a deep collaboration between Gao (Beijing) Intelligent Technology and Agilent Technologies, a global leader in analytical instruments. They’ve developed an online automated solution specifically for analyzing tungsten hexafluoride. This system can measure hydrogen, oxygen, argon, nitrogen, methane, carbon monoxide, carbon dioxide, carbon tetrafluoride, nitrous oxide, sulfur hexafluoride, hydrogen fluoride, and moisture in electronic-grade tungsten hexafluoride. The whole setup is fully compatible with high-purity corrosive special gas conditions and can provide online monitoring and analysis throughout the production line, distillation tower, filling station, and cylinder quality inspection process.

Online Analysis System